Joint Appearance of the Busch Group Companies at Semicon India 2024
08-14-2024
The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions – announce their joint presence at Semicon India 2024.
The booth will showcase the combined competence of the three companies by presenting their wide range of vacuum solutions and technological expertise. This includes vacuum pumps, contamination management systems, leak detectors, valves, gas abatement solutions and comprehensive sub-fab management, all aimed at improving the infrastructure of Indian semiconductor manufacturing facilities. Under the headings "Ultimate Product Range" and "Total Fab Solutions", visitors can discover the Group's joint product portfolio. Rajat Sabharwal, General Manager of Pfeiffer Vacuum India, says: “India is progressively developing into a semiconductor manufacturing nation. The sector is growing steadily, and we are excited to contribute to this growth by providing not only our Total Fab Solutions but also state-of-the-art service support.” Mithun Chakraborty, General Manager of Busch Vacuum Solutions India, adds: “The Indian semiconductor sector is expected to reach a turnover of more than 100 billion US dollars by 2032 and is therefore also promoted by the Indian Government. This growth and the related government focus will enhance India's position in the global market, create jobs, foster innovation, and boost the economy. With its expertise and complete solutions, the Busch Group in India will be part of this development and support the country's burgeoning semiconductor industry.”
Magnetically levitated turbopump from Pfeiffer Vacuum
Unmatched range of vacuum and abatement solutions
ASM 392 mobile leak detector: With its integrated turbomolecular vacuum pump, the ASM 392 from Pfeiffer Vacuum is SEMI S2 compliant and optimized for rapid pump downs and short response times on large test objects. Its dry, frictionless backing pump and a powerful high vacuum pump make it ideal for testing in clean room environments.
ATH 2804 M turbopump: With a compact footprint, Pfeiffer Vacuum’s ATH 2804 M magnetically levitated turbomolecular vacuum pumps provide high gas throughput and are ideal for semiconductor manufacturing processes.
TORRI BD 0100 dry pump: TORRI BD from Busch Vacuum Solutions offer short pump down times for load lock chambers and are among the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market.
CT-TW-H thermal abatement: The high-temperature thermal abatement system from centrotherm clean solutions will be showcased in a digital format. It combines the wide process coverage of flame abatement with the fuel-free aspects of plasma abatement, with lower operating costs and secondary emissions. Able to destroy the molecular process gas NF3 at class-leading levels with extremely low NOx emissions, the CT-TW-H finally delivers a sustainable solution with a minimal carbon footprint to the CVD and metal-etch process family.
Trade show visitors can meet experts from Busch Vacuum Solutions, Pfeiffer Vacuum and centrotherm clean solutions at Semicon India from September 11-13, 2024, in booth H1X01 at India Expo Mart (IEML), Greater Noida.
