Joint Appearance of the Busch Group Companies at Semicon Korea 2025
02-04-2025
The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions – announce their joint presence at Semicon Korea 2025.
The booth of the Busch Group will showcase the combined competence of the three companies by presenting their wide range of vacuum solutions and technological expertise. This includes vacuum pumps, contamination management systems, leak detectors, valves, gas abatement solutions and comprehensive sub-fab management, all aimed at improving the infrastructure of Korean semiconductor manufacturing facilities.
Range of vacuum and abatement solutions
Among the highlights of the exhibition are several innovative products:
TORRI and UltiDry vacuum pumps are essential solutions for the semiconductor market, each offering distinct advantages tailored to specific applications.
TORRI BD dry vacuum pumps from Busch Vacuum Solutions offer short pump-down times for load lock chambers and are among the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market.
When robustness combined with low energy demand is required, UltiDry from Pfeiffer Vacuum+Fab Solutions comes into play. This multi-stage dry vacuum pump is well suited for harsh applications. Engineered to enhance powder management and handle high inlet flow, UltiDry withstands corrosive gases and offers lower power consumption under harsh operation.
The high-temperature thermal abatement system from centrotherm clean solutions combines the wide process coverage of flame abatement with the fuel-free aspects of plasma abatement. It features lower operating costs as well as lower secondary emissions, and it is capable of destroying the molecular process gas NF3 at class-leading levels with extremely low NOx emissions. This system provides a sustainable solution with a minimal carbon footprint for the CVD and metal-etch processes.
Trade show visitors can discover new developments from Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions, and centrotherm clean solutions at Semicon Korea from February 19 to 21, 2025 at booth 122 in hall D at COEX, Seoul. Detailed discussions can be held at booth 322 in hall C in the customer lounge. The event offers an excellent opportunity for attendees to engage with industry leaders and learn more about the latest advancements in vacuum and abatement technology.
Multi-stage dry vacuum pump UltiDry from Pfeiffer Vacuum+Fab Solutions. Source: Pfeiffer Vacuum+Fab Solutions.
