Showcasing Innovation: Busch Group at SEMICON China 2025
02-24-2025
The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions – will present their extensive range of vacuum solutions jointly at SEMICON China 2025.
The booth of the Busch Group will showcase the collective expertise of the three companies. This encompasses vacuum pumps, contamination management systems, leak detectors, valves, gas abatement solutions, and comprehensive sub-fab management – all designed to enhance the infrastructure of semiconductor manufacturing facilities in China.
Innovative vacuum and abatement solutions
Several innovative solutions will be showcased at the exhibition.
The UltiDry from Pfeiffer Vacuum+Fab Solutions excels whenever robustness and low energy demand are essential. This multi-stage dry vacuum pump is tailored for harsh applications, enhancing powder management and handling high inlet flow. UltiDry withstands corrosive gases and ensures lower power consumption even under harsh operating conditions.
The high-temperature thermal abatement system from centrotherm clean solutions merges the extensive process coverage of flame abatement with the fuel-free benefits of plasma abatement. It boasts reduced operating costs and secondary emissions while efficiently destroying the molecular process gas NF3 with very low NOx emissions. This system offers a sustainable solution with a minimal carbon footprint for CVD and metal-etch processes.
Trade show visitors can meet experts from Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions, and centrotherm clean solutions at SEMICON China from March 26 to 28, 2025, at booth 2501 in hall N2 at Shanghai New International Expo Centre. The event provides an excellent opportunity to engage with industry leaders and explore the latest advancements in vacuum and abatement technology.
Multi-stage dry vacuum pump UltiDry from Pfeiffer Vacuum+Fab Solutions. Source: Pfeiffer Vacuum+Fab Solutions.
